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Excimer laser gas

Products

Excimer laser gas

Product description
First, the product name
Product Name: Excimer laser gas
Other names: argon fluoride laser gas (193 nm); cesium fluoride laser gas (248 nm); cesium chloride laser gas (308 nm)
Second, product introduction
Molecular formula: ArF, KrF, XeCl
UN NO: UN 1956
Product purity: 99.9999%
Third, the packaging instructions
Cylinder volume: 11L, 16L, 20L, 49L, 50L
Valve type: CGA679, DIN 8, DIN 14
Fourth, product indicators
High power excimer laser gas
Available wavelength 193 nm ArF
248 nm KrF
308 nm XeCl
450nm~520nm XeF
Maximum UV power 540 W
Maximum UV energy 1100 mj
Repeat frequency variable, 1~600 Hz
Pulse stability 0.5%~1%, rms
Long-term drift 0.1%~0.5%, rms
Uniform beam distribution, flat top
Pulse width 10~20 ns
Correlation gas purity F2, 99.9%
Ar, 99.9999%
He, 99.9999%
Ne, 99.9999%
HCl, electronic grade
Kr, 99.999%
Xe, 99.999%
O2, 99.999%
H2, 99.999%
Gas working temperature - 40 0C ~ + 74 0C
Gas pressure 520 psig ~ 2400 psig / 35 Bar ~ 167 Bar
Cylinder specifications 10L, 16L, 20L, 50L
Valve interface CGA 679, CGA 330, CGA 580, DIN 6, DIN 8, DIN 14
Five, packaging specifications
 

Serial number

product

State (meteorological or liquid phase)

Container (L or m3)

Working pressure (MPa)

Height (excluding bottle valve, bottle cap) mm

Empty weight (excluding bottle valve, bottle cap) kg

Filling capacity (pressure or weight) MPa or kg

Supply mode

Brand

1

Excimer laser gas

Gaseous state

4L(Φ140)

15MPa

395

7.1

10-15MPa

Available in cylinder or aluminum alloy cylinders

Runaway

2

Excimer laser gas

Gaseous state

8L(Φ140)

15MPa

680

11.5

10-15MPa

3

Excimer laser gas

Gaseous state

10L(Φ159)

15MPa

671

13.5

10-15MPa

4

Excimer laser gas

Gaseous state

15L(Φ159)

15MPa

956

19

10-15MPa

5

Excimer laser gas

Gaseous state

20L(Φ219)

15MPa

715

23

10-15MPa

6

Excimer laser gas

Gaseous state

40L(Φ219)

15MPa

1315

48

10-15MPa

7

Excimer laser gas

Gaseous state

50L(Φ219)

15MPa

1510

66

10-15MPa

8

Remarks

Due to differences in container design pressure, etc., the above data is slightly different, please be aware. Please contact 40009 63336 or 18563963366 for details.

 
Excimer laser gas application
The upgrading of industrial technology needs to balance the contradiction between increasing performance requirements and processing speed and manufacturing costs. The birth of excimer lasers, known as its high photon energy, is once again at the forefront of cutting-edge industrial laser solutions in an era of increasing demand for breakthrough materials. As the representative of the most effective and reliable pulsed UV laser technology today, excimer lasers have effectively advanced such as semiconductor, AMOLED flat panel display, thin film, silicon substrate processing, organometallic precipitation, high temperature superconductivity, etching, material research, automotive Technological innovations in a variety of growth industries such as manufacturing, biomedical, fiber optics, diamond marking equipment and alternative energy.
Seven, matters needing attention
The excimer laser gas is a high-pressure filling gas, and should be used after being depressurized and depressurized. The used cylinders are used for a long period of time. All expired cylinders must be sent to a department for safety inspection before they can continue to be used. When using the exhaust gas in each bottle of gas, the residual pressure in the bottle should be kept at 0.5MPa, and the minimum pressure should not be lower than 0.25MPa. The valve should be closed to ensure the gas quality and safety. Bottled gas products should be stacked in storage, storage and use. It is strictly forbidden to stack flammable gas and combustion-supporting gas. It is not allowed to be close to open flames and heat sources. Do not near fire, do not touch oil, do not expose to the sun, do not throw Do not hit, do not conduct arcing or arcing on the cylinder, and prohibit rough handling.
Corresponding parameter set not found, please add it in property template of background
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