NF3-Nitrogen Trifluoride
Formula: NF3
CAS No.: 7783-54-2
EINECS No.: 232-007-1
UN No.: UN2451
Purity: 99%-100%
Dot Class: 2.3 Toxic gases
Appearance: Colorless with a slightly musty odor
Nitrogen trifluoride is the inorganic compound with the formula. It is a colorless, non-flammable, toxic gas with a slightly musty odor. In contrast with ammonia, it is nonbasic. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics.
Used as an etchant in microelectronics
Used as key chemical agent used to manufacture certain types of photovoltaic cells for solar panels,etc.
| GRADE 2.7 | GRADE 4 | GRADE 4.5 | |
| Purity | 99.70% | 99.99% | 100.00% |
| Oxygen | < 10 ppmv | < 5 pmmv | |
| Oxygen and Argon | < 700 ppmv | ||
| Nitrogen | < 700 ppmv | < 10 ppmv | < 5 ppmv |
| Carbon Dioxide | < 25 ppmv | < 10 ppmv | < 3 ppmv |
| Carbon Monoxide | < 25 ppmv | < 0.5 ppmv | |
| Water | < 1 ppmv | < 1 ppmv | < 1 ppmv |
| Carbon Tetrafluoride | < 1,500 ppmv | < 40 ppmv | < 25 ppmv |
| Nitrous Oxide | < 50 ppmv | < 10 ppmv | < 2 ppmv |
| Acidity (HF) | < 1 ppmv | < 5 ppmv | < 1 ppmv |
| Sulfur Hexafluoride | < 50 ppmv | < 1 ppmv |
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